CEE 100 Standard Operating Procedure

Updated on 10/13/2014

• Fill out the paper log before use.

The controller panel

1. Load Sample

1. Choose and set up the appropriate chuck for CEE spinner (there should be three chuck sizes for the spin coater).
2. Place the sample in the middle of the chuck.

2. Turn on the power

3. Edit Process

1. Press "PROG". Choose the program number from 0 to 6, and press "Enter". For single step, program "0" should be fine.
2. The display is asking "VEL", meaning velocity. Type the velocity (rpm), and press "ENTER".
3. The display is asking "RMP", meaning acceleration. Type the RMP (rpm/sec), and press "ENTER".
4. The display is asking "TIME". Type the time (sec), and press "ENTER".
5. "END" on the display is blinking. Press "ENTER".

4. Run the process

1. Press "RUN".
2. The display is asking the program number. Enter the number.
3. The display shows "PRESS START-SPIN". Press "START".
4. The display shows "TESTING CENTERING". Note that this initial spin is a low speed spin for sample alignment purposes. Once the spinning process stops, user could proceed to the next step or adjust the position of the sample.
5. The display shows "0 TO RETEST / START". If you want to repeat the position/alignment test of the sample, press the numeric "0" button.
6. Once the sample is center, apply the coating solution onto your sample.
7. Close the cover of the spinner.
8. Press "START" to initiate the spin process. The display shows the spin speed used as well as a countdown timer: RPM XXXX TIME XX.

5. Unload the sample

• The spinner beeps when the process is done.
  • Press "RESET" to stop the alarm.

6. Clean the spinner

1. Clean the spinner. Use acetone, then IPA with clean room wipes to remove all traces of coating material from the chuck(s), bowl, and lid. Do not spray directly onto the sample chuck or shaft.

7. Finishing up

1. Turn off the power to the spin coat when you are done.
2. Close the lid.