Alignment Error of Heidelberg DWL66+ Laser Writer

Updated on 7/27/2015

The alignment error is determined to be ~0.5 µm at most, as shown below.

1. A center alignment mark.

2. Vernier marks.

• The displacements of the outer from the inner bars are 0.5, 1.0, 1.5, ... µm, respectively.  If the 2nd inner bar is aligned with 2nd outer bar, then the alignment error is shown to be 1 µm.