Nanostrip Operation Procedure

Updated on 10/16/2014

Warnings

• Before use, please refer to MSDS [1].
• Nanostrip is used to remove organic RESIDUES from substrates. Since Nanostrip reacts with organic compounds vigorously, you will cause an explosion if you immerse samples with solvents, photoresists, or other organics.
• Nanostrip is a more stable (but still dangerous) REPLACEMENT for Piranha solution.
• Piranha is not allowed in the fab.
• NEVER use plastic wares for Nanostrip.
• Glassware must be used for Nanostrip.
• Clean glassware physically and then chemically before use. When the glassware is cleaned chemically, use commercial surfactants (or concentrated sulfuric acid).
• Samples must be rinsed with DI water AND dried before immersion into Nanostrip.
• It can be used at room temperature, but its effectiveness is increased by heating it to about 65 C.
• You must have a reservation before using Nanostrip.

Note:

• Make sure that the wipe marked with you name, date, time, and chemical name is put near or under the beaker with the chemicals.
• Nanostrip and acids other than HF are handled in Acid bench.
• You are not allowed to go out of the area, wearing an apron, gloves, and face mask to prevent the contamination.
• Make sure of the location of eye washer and shower.
• If you have an accident on Nanostrip or strong acid, then wash the suffered area with running water for more than 15 minutes.
• Containers and tweezers are kept on the shelf before the bench.
• Waste wipes are thrown away into the garbage before the bench. ‎

Operation procedure

1. Wear a chemical resistant apron, gloves, and a face mask (see HF operation procedure)

2. Turn on DI water to fill the rinsing bath with DI water.

• Note: Hold the DI water knob through a wipe to prevent the contamination.

3. Pour Nanostrip into a clean, dry glass beaker.

4. Place the beaker onto the hot plate.

5. Put the temperature probe in the beaker.

6. Turn on the hotplate

7. Set the temperature at 60 C.

8. When the temperature of Nanostrip is stable at 60 C, place the sample into the beaker.

9. Measure the time.

10. When the process is done, the sample is rinsed in DI water bath.

11. Dry the sample on a wipe in the bench.

12. Turn off the hot plate.

13. Allow the Nanostrip waste solution to cool down to room temperature.

• CAUTION! Do NOT pour HOT Nanostrip into the waste bottle!

14. When at room temperature, pour Nanostrip into the waste container on the right side of the acid hood.

• Note: Do not overfill. If you start a new Nanostrip waste bottle, make sure it is dry on the inside and outside.

15. Wash the container, sample holder, and tweezers in the DI water bath or the sink.

16. Wipe off any liquid on the bench, and throw the wipes away to the garbage before the bench.

17. Take off the apron, gloves, and face mask, and put them back to the original locations.