New QNF Spinner Operation Procedure

Updated on 4/5/2016

The control panel

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Contents

1 Check-in

2 Load Sample

3 Edit Process

4 Run

5 Unload the sample

6 Clean the spinner

7 Check-out

1. Check-in

1. Login Spinner on the scheduler of the IRIS system before use. 

2. Load Sample

1. Open a lid.

2. Follow the SOP of spinner benches.

3. Install a wafer chuck.

3. Place a wafer (sample) on the chuck.

4. Press the F2 on the control panel to vacuum the sample.

3. Edit Process

Note:

• You can set up the spin conditions of three steps.
• You can clear the previous conditions by pressing F1 button.
• Actual spinning speed and time are displayed on the bottom of the screen.

1. Highlight an item on the screen, using the arrow buttons.

2. Press the "Enter" button.

3. Enter the spin speed or time.

4. Press the "Enter" button.

4. Run

1. Step on the pedal to start the process.

5. Unload the sample

1. Open the lid after the process.

2. Remove the wafer (sample) from the chuck.

• The wafer vacuum is turned off in 15 sec, and the timer is shown on the bottom of the screen.

6. Clean the spinner

1. Clean the spinner, according to the SOP of spinner benches.

2. Remove the chuck from the spinner.

• Use acetone with clean room wipes to remove all traces of coating material from the chuck(s), bowl, and lid. Do not spray directly onto the sample chuck or shaft.

3. Close the lid.

7. Check-out

1. Logout Spinner on the scheduler of the IRIS system after use.