P7 3D Scan

Updated on 10/9/2014

Contents

1 The "Catalog" Window

2 Load Sample

3 Scan Surface Profile

3.1 Choose Recipe

3.2 Set Scan Parameters

3.3 View The Surface

3.4 Start Scan

3.5 Leveling

4 Analyze 3D surface profile on Apex application

5 Save the analysis on Apex Application

6 Save the measured result

7 Print the measured result

8 Unload Sample

9 Log-off PC

1. The "Catalog" Window

1. You will see the "Catalog" window.

2. Click the light-blue "Scan" icon on the right side, and the "Scan Recipe" button on the left side.

• If you use the P7 2D profiler, then 3D scan option is not available.
• If you use the P7 2D&3D profiler, then click the "2D" button in the Menu,

2. Load Sample

1. Open the front door.

2. Ensure that a sample chuck is in a loading position (close to the window).

3. If not, choose and click "Manual Load" from the drop-down menu of "Sample" in the Menu.

4. The sample chuck is moved automatically to the loading position.

5. Load your sample on the sample chuck.

• NOTE: The sample MUST be placed on the center of the chuck.

‎

6. Turn on the stage vacuum if necessary.

• The size for the stage vacuum is 2" x 2".

7. Close the front door.

8. Choose and click "Manual Load" from the drop-down menu of "Sample" in the Menu again.

9. The sample chuck is moved automatically beneath the stylus.

3. Scan Surface Profile

3.1 Choose Recipe

1. Choose "NORMAL OPERATION 3D" from the "Normal Operation" directory.

• This is a default recipe. You can change the parameters for your scan, but not save the recipe.

‎

2. Click the "View/Modify" button.

3. The "Security Information" dialog box appears. Click "OK".

3.2 Set Scan Parameters

1. The "Recipe Editor" window shows up.

• The scanning parameters are determined on the following screen for the "Scan Preparation Definition" button.
• The screens for the other buttons are set up for the data output. If you check the film thickness only, then you do not have to touch them.

2. Input the parameters, and click the "X/Y view screen" icon.

3.3 View The Surface

1. The CCD image window ("Teach Scan Length") appears.

• NOTE: The safe area can be set up from the drop-down menu shown by right-click of the mouse on the right disc image, so that the stylus cannot go beyond the safe area, and the risk of damaging the stylus can be minimized. The default setting is 2". See Safe Area.

2. Click the "FOCUS" icon.

3. The stylus is moved down automatically to focus the image on the surface.

• The blue rectangular in the image indicates the scanning area.
• The safe area was changed to "Rectangle_Size_1" in this case.

4. You can use arrows in the screen menu or the key board to move the chuck.

5. You can also rotate the chuck manually, using the bar (coarse adjustment) and knob (fine adjustment) under the chuck.

6. The scan length and location can be changed on the image by the mouse.

• To change the location, left-click the mouse on the location where you want to change.
• To change the scan length, left-click the mouse on the starting location, and drag the cursor to the ending location while holding the left button of the mouse.
  • The scan length changed is also shown on the "Recipe Editor" window.

3.4 Start Scan

1. Start a scan by clicking the "START" button on the "Catalog", "Recipe Editor", or "Teach Scan Length" window.

2. The tip of the stylus is not shown on the CCD image during the scanning.

3. The "Analysis" window appears when the scanning ends.

3.5 Leveling

• You can also handle the data on Apex application shown below.

1. Choose "Line Level" or "Y Scan Leveling" from the drop-down menu of Operations.

2. If you choose "Line Leveling", then the "Line Leveling" dialog box appears.

3. Move the cursors in the image to where you want to level. Then, Click the "Apply" button.

4. Analyze 3D surface profile on Apex application

1. Click icon in the top menu.

2. Apex application software is opened.

3. You can try several functions on the application.

3-1. For example, choose the item from the drop-down menu of "Studies" in the menu.

3-2. If you choose "Distance Measurement", then the following result is shown.

3-3. If you choose "3D View", then the following result is shown.

• You can zoom, rotate, or tilt the 3D view image by the mouse.

5. Save the analysis on Apex Application

1. Click "File" in the menu to show the drop-down menu, so that you can choose how to output the data.

6. Save the measured result

1. Choose and click "Save Data" from the drop-down menu of File in the Menu.

‎

2. The data is saved in the "scandata" directory.

‎

3. You can call your data from the "Scan Data" screen in the "Catalog" window.

7. Print the measured result

1. Click "File" in the menu on the "Scan Data" screen on the "Catalog" window.

2. Choose the data from the right box.

2. Choose how to print or output the data.

8. Unload Sample

1. Choose and click "Manual Load" from the drop-down menu of "Sample" in the Menu.

2. The sample chuck is moved automatically to the loading position.

3. Take out your sample.

4. Close the front door.