SRD Standard Operating Procedure

Updated on 10/13/2014

1. Turn on SRD

1. Press the MAIN POWER button.

2. If the light under SRD is not on, or not blinking, reset the tool by pushing the lever down.

3. Press the power button of SRD (see the above).

3. Load the sample

1. Open the door.

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2. Insert wafer(s) into the cassette.

3. Close the door securely.

4. Set the parameters and start cleaning the wafer(s)

• Default recipe
  • Rinse: 350 rpm, 90 sec
  • Dry: 3000 rpm, 180 sec

1. Press RINSE SPEED.

2. The SPEED-RPM indicator shows blank.

3. Input the rinse speed.

4. Press ENTER.

5. Likewise, enter RINSE TIME, DRY SPEED, and DRY TIME.

6. Press the START button.

7. The tool will stop automatically.

5. Unload the sample

1. Open the door.

2. Take the wafer(s) out of the tool.

3. Close the door securely.

6. Shut down

1. Press the EMERGENCY POWER OFF button next to the MAIN POWER button.

2. Close the valve of nitrogen gas line behind the tool.

3. Close the valve of DI water line.

4. Tell the staff that you are done.