An absorbing film on glass

Contents

1 Methods on Absorbing Films

2 Example

2.1 Load SE data file and append T data file

2.2 Build up the model layers

2.3 Adjust the thickness manually

2.4 Normal fit

2.5 MSE check

1. Methods on Absorbing Films

2. Example

• Combination of spectroscopic ellipsometry (SE) and transmission spectroscopy (T).
• Assume that SE and T spectra of Cr film on glass were measured and saved as Cr_on_glass_SE.dat and Cr_on_glass_T.dat, respectively.

2.1 Load SE data file and append T data file

1. Right-click on the "Experimental" window to popup the menu.

2. Choose "File" and "Open Exp. File".

3. Load "Cr_on_glass_SE".

4. Choose "File" and "Append Exp. File".

5. Load "Cr_on_glass_T".

2.2 Build up the model layers

1. Right-click on the "Model" window to popup the menu.

2. Choose "Add Layer", and load "glass_genosc.mat" as the substrate.

3. General Oscillator layer window appears. Click "OK".

4. Right-click on the "Model" window to popup the menu.

5. Choose "Add Layer", and load "Cr_g.mat" as the Cr film model.

6. General Oscillator layer window appears.

7. Check the fit boxes of thickness and n and k in the "Opt Const Fit" box.

8. Click "OK".

2.3 Adjust the thickness manually

1. Move the cursor on the "cr-g" layer, and change the thickness, using a wheel on the mouse, until the fit curve is close the experimental curve in the "Graph" window.

2.4 Normal fit

1. Right-click on the Fit window to pop-up the menu.

2. Click the "Normal Fit".

• If the message is "Maximum iterations reached", the MSE might not be the minimum. So, you can do "Normal Fit", again, until the minimum is reached.

3. The MSE does not change anymore.

2.5 MSE check

• See MSE check.

1. The MSE for the thickness of 18.898 nm is the minimum, according to the MSE check.