Isotropic + Depolarization

1. Choose "Spectroscopic Scan" from the drop-down menu of "Acquire Data" in the menu, which is shown on the "Hardware" window.

2. The "VASE Scan" dialog box appears.

• See the detail of VASE Scan dialog box.

3. Click the "More Settings >>" button to load the standard scan settings.

4. The "Ellipsometric Data Acquisition Options" dialog box appears.

5. Follow the setting for films on Si wafer shown in the following figure, which indicates the "Isotropic + Depolarization" setting.

• If the sample is a film on glass, then the number of Revs/measurement should be increased more (~100).
• Warning: When the isotropic + depolarization measurement is done, the sample type should be back to "Isotropic", to avoid confusion.

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4. Click "OK".