YES Recipes

Updated on 10/14/2014

Process and Recipe Numbers

• Recipe 0: System pump down.
• Recipe 1-6: User defined CVD process recipes.
• Recipe 7: Primes system when new chemical source bottles are installed.
• Recipe 8: For solvent cleaning of bottle 1 lines, may be other than IPA (must be compatible with silane).
• Recipe 9: For solvent cleaning of bottle 2 lines, may be other than IPA (must be compatible with silane).
• Recipe 10: User defined Image Reversal process recipe.
• Recipe 11-14: User defined Plasma Process recipes.
• Recipe 15: For evacuation if process is interrupted (reset, power failure, etc). User will be cued when to use this recipe.
• Recipe 16: For venting if process is interrupted (reset, power failure, etc). User will be cued when to use this recipe.

HMDS vapor priming

The HMDS vapor priming has two parts: Plasma Cleaning and CVD of HMDS

1. Temperature setting
   1. Door, Front, Middle, and Rear: 150°C
   2. Flask 1 and 2: 140°C
   3. Flask Line 1 and 2: 145°C
   4. Vacuum Line 1 and 2: 150°C
2. Plasma cleaning of the subsrate
   1. Recipe #11
   2. Gas#1: 1(ON)
   3. Gas#2: 0(OFF)
   4. Gas#3: 0(OFF)
   5. Process time: 300 sec
   6. RF power level: 500 W
   7. Recipe Link: #1
   8. Base pressure: 0.2 Torr
   9. The number of evacuation purges: 3
   10. Hi Abort process pressure: 1.00
   11. Low Abort process pressure: 0.075
   12. RF calculated valve in Watts: 0
3. HMDS Vapor Priming when using bottle 1 lines
   1. Source 1 injector volume: 5 ml
   2. Source 2 Injector volume: 0
   3. Process time: 300 sec
   4. Injector 1 pulse time open in 1/100 seconds: 8
   5. Injector 2 pulse time open in 1/100 seconds: 0
   6. Warm up delay in minutes: 0
   7. Injector 1 pulse time close in 1/100 seconds: 8
   8. Injector 2 pulse time close in 1/100 seconds: 0
   9. The number of dehydrate purges: 3
   10. Base pressure in Torr: 1
   11. Abort Pressure in Torr: 45
   12. Purge pressure HI in Torr: 500
   13. Evac time in seconds: 180
   14. Volume per pulse multiplier in ml: 0.1
   15. Purge pressure low in Torr: 10
   16. No. of evacuation purge: 3

CVD line priming (Recipe 7)

1. Temperature setting (when using HMDS, for other CVD sources contact Facility staff)
   1. Door, Front, Middle, and Rear: 150°C
   2. Flask 1 and 2: 140°C
   3. Flask Line 1 and 2: 145°C
   4. Vacuum Line 1 and 2: 150°C
2. Prime Injection
   1. Source 1 and 2 Injection volume in mL: 5
   2. The total process time in seconds: 180
   3. Injector 1 and 2 Pulse Time Open in 1/100 seconds: 25
   4. Injector 1 and 2 Pulse Time Closed in 1/100 seconds: 25
   5. Standard Source 1 and 2 level in mL: 30
   6. The number of Evacuation Purges: 3
   7. Purge pressure HI in Torr: 500
   8. Base pressure in Torr: 1
   9. Volume per pulse multiplier in mL: 0.10
   10. Purge pressure LOW in Torr: 10
   11. Evac time in seconds: 180
   12. Abort pressure in Torr: 100

CVD line cleaning (recipes 8 and 9)

1. Temperature setting
   1. Door, Front, Middle, and Rear: 150°C
   2. Flask 1 and 2: 140°C
   3. Flask Line 1 and 2: 145°C
   4. Vacuum Line 1 and 2: 150°C
2. Line cleaning with IPA
   1. Solvent: IPA
   2. The volume 1 and 2 in mL: 9
   3. The total process time in seconds: 180
   4. Open time durations: 10
   5. Close time duration: 10
   6. Warm up delay in minutes: 0
   7. The number of dehydration purges: 3
   8. Base pressure in Torr: 1
   9. Abort pressure in Torr: 400
   10. Purge pressure HI in Torr: 500
   11. The number of evacuation purges: 3
   12. Volume per pulse multiplier in mL: 0.10
   13. Purge pressure LOW in Torr: 10
   14. Evac time in seconds: 180