Transparent or Semi-transparent Film Measurement
Updated on 11/6/2014
Contents
1 Load Application
2 Select Objective Lens
3 Setting in Measure Controls window
3.1 System Characterization File
3.2 Film Controls
3.3 Others
4 Load Sample
5 Set Z Stop
6 Find and Null Fringe
7 Set Light Level
8 Set Analyze Controls
9 Measure
1. Load Application
1. Click the "Film7k.app" for transparent or semi-transparent films measurement.
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2. The application is opened.
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2. Select Objective Lens
1. Click the "Objective" button to change an objective lens.
- The objective lens is automatically changed.
- The objective lenses of x5, x20, x50 are available.
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3. Setting in Measure Controls window
1. Click the Measure Controls button.
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2. Measure Controls window opens.
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3.1 System Characterization File
1. Click the "Select Sys Char File".
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2. MetroPro file directory opens.
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3. Choose the following System Characterization file from the file directory.
- If the objective lens is x5, then 0050D.syc.
- If the objective lens is x20, then 0200D.syc.
- If the objective lens is x50, then 0500D.syc.
3.2 Film Controls
1. Set up Film Mode, Film Min Thickness, Film Max Thickness, and Index of Refraction (see NewView_Films_Application,_OMP-0506B).
- Resist pattern: Top Surface
- No pattern film: Top Surface for surface roughness, FilmThickness for thickness measurement
- You need to know refractive index before measurement because it affects the result very much.
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3.3 Others
1. Set up Camera Mode, Scan Length, Image Zoom, and Number of Averages, if necessary.
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* The procedures from #4 to #8 are the same as those of Surface Structure and Roughness Measurement.
4. Load Sample
5. Set Z Stop
6. Find and Null Fringe
7. Set Light Level
8. Set Analyze Controls
9. Measure
1. Click the "Measure" button.
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2. The result is shown on the screen.
- The film shown below was a spin-coat resist film without development.
- The Film mode was Film Thickness mode.
- If the resist film is developed, use "Top Surface".
- You can also try "Display Pixel Trace" or "Analyze Film".
- The "Thickness Mean" strongly depends on the refractive index.
- See NewView_Films_Application,_OMP-0506B as well.
- You might want to double-check the thickness using another metrology tool.
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