Non-ideality on Data

• Assume that SE and depolarization on a thick organic film (~3 µm) on Si were measured.

Contents

1 Load and append the SE and depolarization data

2 Build up the model layer

3 Normal fit

4 Open Model Options dialog box

5 Normal fit 2

1. Load and append the SE and depolarization data

1. Load SE + Depolarization data in the Experimental window.

• See Isotropic + Depolarization.

2. Build up the model layer

1. Build up the model structure: Si_jaw as the substrate and cauchy.mat as the film.

2. Adjust the thickness manually, using the mouse wheel.

3. Normal fit

1. Normal fit in the Fit window.

2. The MSE is shown to be 118.

4. Open Model Options dialog box

1. Right-click on the cauchy layer to popup the menu.

2. Choose "Options"

3. The Model Options dialog box appears.

4. Check the fit box of Thickness uniformity.

• Make sure that the number in the Thickness Non-uniformity is zero.

5. Click "OK".

5. Normal fit 2

1. Normal fit in the Fit window.

2. As can be seen the following figure, the MSE is improved from 118 to 8.029.