YES Oven Standard Operating Procedure

Updated on 8/14/2015

Contents

1 Check-in

2 Start

3 Vent Chamber

4 Load Substrate

5 Run a CVD Process

6 Unload Substrate and Evacuate Chamber

7 Standby

8 Check-out

9 Supplemental Documents

1. Check-in

1. Login YES Oven on the scheduler in the IRIS system before use. 

2. Start

1. Turn on the PE-1000 plasma power supply.

2. Make sure that the temperature settings are right:

1. Door, Front, Middle, and Rear: 150°C
2. Flask 1 and 2: 140°C
3. Flask Line 1 and 2: 145°C
4. Vacuum Line 1 and 2: 150°C

3. Vent Chamber

1. Touch the "PRESS TO SELECT RECIPE NUMBER".

2. The numeric entry pad appears.

3. Enter the venting recipe #16, press "Enter", and then "Done".

4. Touch the "PRESS TO START", and the venting procedure will start.

5. When the process is completed, the message will show up and a buzz will be produced by the tool.

6. Touch the "PRESS TO RESET".

4. Load Substrate

1. Open the large door when the chamber is vented.

2. Place the substrate(s) only on the floating tray-3, 6, 9, or 12 (starting from the upper tray)

3. Close the door.

5. Run a CVD Process

• Starting and stopping recipe is the same as above.

1. HMDS vapor priming

• Use Recipe #11 (including the O2 plasma cleaning and HMDS priming recipe #1).

2. Other CVD Processes

• Recipes # 10 is for "Reverse Imaging" using Ammonia gas.
• New recipes have to be developed for other CVD processes. Please consult Facility staff.

6. Unload Substrate and Evacuate Chamber

1. After the process, vent the chamber and unload your sample.
2. Enter the pumping recipe #0 (or #15) and press "Enter", and then "Done". 
3. Touch the "PRESS TO START".
4. Wait until the pressure reaches below 1.0 Torr.
5. Touch the "PRESS TO RESET".

7. Standby

1. Turn off the PE-1000 plasma power supply.

Notes:

• Do NOT use this tool to descum or strip samples.
• Inform Facility staff if you want to deposit any silanes other than HMDS.
• Recipes #1 and #11 are exclusively for HMDS deposition, do not change the parameters.
• The YES system is always maintained at 150 C optimized for HMDS deposition. If you want to change the temperature, please contact Facility staff.

8. Check-out

1. Logout YES Oven on the scheduler in the IRIS system after use. 

9. Supplemental Documents

• YES Oven Recipes